Project archive
Explore completed semiconductor equipment and industrial control-system projects.
Converted manual swing doors on a diffusion system into automatic sliding doors interlocked with the loadlock gate, preventing operator opening commands while the gate is open and reducing the risk of particle ingress.
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Built the electrical controls and operating sequence for a two-tank local chemical supply system that exchanges signals with SAT chemical etching equipment, verifies concentration and temperature, and supplies chemicals automatically.
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Added non-contact flow monitoring to an AL spin etcher and upgraded its interlocks so persistent abnormal flow inhibits new processing while allowing an in-process wafer to rinse and unload safely.
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Added non-contact flow detection to the BHF chemical-bath circulation and DI supply lines, with protective interlocks that stop the heater, circulation pump and process when an abnormal-flow contact is detected.
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Inspected, refurbished, installed, commissioned and process-qualified four FSI Mercury MP systems introduced from overseas or purchased as used equipment.
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Provides scheduled and emergency maintenance for the SCADA, PLC and electrical control systems of a continuously operated water treatment plant, including communications recovery, sequence correction, alarm analysis, hardware diagnosis and legacy PLC upgrades.
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Implemented the electrical wiring and FFU controls for a post-cleaning quartz and silicon diffusion-tube dryer using HEPA-filtered downflow, adjustable airflow, manual operation and alarm shutdown.
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