Work Performed
Project Background
Onsemi needed condition assessment, recovery, installation and process qualification to bring aging FSI Mercury MP systems into production service. JUNSEMI worked on two systems supplied by a Dutch equipment company in May and August 2022, one system introduced by a U.S. equipment company around September 2022, and one used system purchased by Onsemi in February 2023.
Scope of Work
• On-site condition inspection and failure diagnosis
• Troubleshooting of common legacy Mercury issues, including boot and flow faults
• Hardware setup and utility connection checks
• Installation, commissioning and process setup
• Particle and etch-rate testing
• APM and SPM condition verification and recipe optimization
Available Improvement Work
• Improved a Helios (Hot System) condition in which a momentary stop powered off the system and allowed processing to continue without an alarm: separated the power supply and connected controller power to a UPS
• Exhaust alarm using both exhaust pressure and flow detection
• Touch-screen chemical supply history recording
• DI-water digital pressure gauge and alarm addition
Qualification Scope
The work went beyond powering on the equipment and included unit-process qualification for production operation. Replacement parts and improvement scope are determined after reviewing equipment condition, available drawings, parts availability and the customer's safety requirements.
Service Position
JUNSEMI is an independent field engineering service provider, not the equipment manufacturer's authorized service organization. Support for every model or part cannot be guaranteed; feasibility and risks are explained after a preliminary assessment.
Verified Result
Completed refurbishment, installation, commissioning and unit-process qualification for four Mercury MP systems at the Onsemi site.
Field Photos
