Work Performed
Field challenge
The BHF tool had no flow sensor on either the chemical-bath circulation line or the DI supply line, so the actual flow condition could not be confirmed. The control system could not immediately detect loss of circulation or DI supply, creating a need for monitoring and shutdown logic that would protect both the bath and the running process.
Work / Solution
KEYENCE non-contact clamp-on flow sensors were applied to the BHF circulation and DI supply lines. JUNSEMI completed sensor installation, the required piping work, electrical wiring, PLC programming and touch-panel updates, linking each sensor's contact output to the PLC. When an abnormal-flow contact is detected, the operator screen displays an alarm, the heater and circulation pump are stopped, and the equipment process is halted. This project used discrete abnormal-flow contacts for equipment protection rather than analog flow-value display.
Key functions and engineering
• BHF chemical-bath circulation monitoring
• DI supply-line flow monitoring
• KEYENCE non-contact clamp-on flow sensors
• Sensor contact signals integrated with PLC inputs
• Abnormal-flow alarm and touch-panel indication
• Heater and circulation-pump shutdown on alarm
• Process-stop protective interlock
• Integrated sensor, piping, electrical, PLC and touch-panel retrofit
Verified Result
Verified BHF circulation and DI supply detection, abnormal-flow alarms, heater and pump shutdown, and the process-stop interlock together with the customer. No numerical quality-improvement claim is made because quantified data was not available.
Field Photos
