Work Performed
Field challenge
The Load 1 and Load 2 fronts of the diffusion system used transparent PVC manual swing doors. Opening a front door while the loadlock gate valve was open could introduce external particles into the equipment, and a particle-related process defect had been reported. The customer required an automatic interlock that would reject a foot-switch opening command whenever the gate was open.
Work / Solution
JUNSEMI defined the operating concept and converted the manual doors to transparent, actuator-driven sliding doors. Mechanical design, fabrication and installation were coordinated with a specialist contractor, while JUNSEMI completed the electrical work, wiring, PLC programming and integration with the existing equipment. The gate-open sensor was linked to the door logic so the foot switch cannot open the door while the loadlock gate is open. A two-minute auto-close timer was added after wafer-carrier unloading, together with an area-sensor safety interlock that restricts closing motion when a person or obstacle is detected.
Key functions and engineering
• Automatic sliding doors for diffusion-system Load 1 and Load 2
• Actuator-based conversion from manual transparent PVC swing doors
• PLC integration with the loadlock gate-open sensor
• Foot-switch opening command inhibited while the gate is open
• Two-minute auto-close after wafer-carrier unloading
• Area-sensor obstacle and personnel protection interlock
• Concept definition, contractor coordination, electrical wiring and control integration
Verified Result
Verified gate-linked opening inhibition, foot-switch operation, the two-minute auto-close sequence and the area-sensor safety interlock. No numerical particle-defect reduction is claimed because quantified production data was not available.