2024.12 - 2024.12

AL Spin Etcher Flow Meter Retrofit

Retrofitted flow meters without major piping changes and added chemical, DIW and air monitoring with equipment interlocks.

개조개선flowmeterkeyenceASEAl spind etcher

Work Performed

Improve process utility monitoring while retaining the existing piping configuration.

Installed compatible flow meters and added monitoring for chemical, DIW and air lines.

Integrated the new signals into the equipment interlock logic and verified operation.

Send the equipment or controller model, current issue and preferred schedule. We will reply with the information needed to define the work scope.

AL Spin Etcher Flow Meter Retrofit | JUNgenius · 제이유엔지니어스