Work Performed
Field challenge
Quartz and silicon tubes used in diffusion processing require drying after cleaning. The previous approach supplied N2 inside the tubes. The customer requested a dryer that instead directs HEPA-filtered clean air from top to bottom through an FFU-based downflow arrangement.
Work / Solution
JUNSEMI completed the electrical work and wiring to the customer's equipment specification and implemented the FFU controls. Operating conditions were configured so air passing through the HEPA filter flows toward the cleaned tubes, and the FFU airflow was adjusted on site to establish the required downflow.
Key functions and engineering
• Post-cleaning drying for quartz and silicon diffusion tubes
• HEPA filter and FFU-based downflow configuration
• FFU start and stop control
• Adjustable FFU airflow setting
• FFU shutdown on alarm
• Manual operating mode
• Equipment electrical work and wiring
Verified Result
Completed the equipment wiring and FFU controls to the ordered specification and verified manual FFU operation, alarm shutdown and the configured downflow. No numerical drying-performance or improvement claim is made because separate measurement data was not available.