JUNgeniusIndustrial Engineering

2026.04

Custom Load Lock Exhaust Controller

Developed a controller using an MKS 907 vacuum gauge and an additional pressure sensor to manage load-lock exhaust after vent completion.

주문제작Etch반도체
Custom Load Lock Exhaust Controller field photo

Work Performed

Objective

Improve vacuum and vent-state detection and safely discharge residual gas after venting.

Work Performed

Integrated the existing MKS vacuum signal with a new pressure sensor and added exhaust-valve control logic.

Verification

Checked the agreed vacuum, vent and exhaust sequence under equipment operating conditions.

Field Photos

Custom Load Lock Exhaust Controller detail 1Custom Load Lock Exhaust Controller detail 2Custom Load Lock Exhaust Controller detail 3Custom Load Lock Exhaust Controller detail 4Custom Load Lock Exhaust Controller detail 5Custom Load Lock Exhaust Controller detail 6

Start with the equipment model and current symptom.

Send the equipment or controller model, current issue and preferred schedule. We will reply with the information needed to define the work scope.

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