JUNgeniusIndustrial Engineering

2026.08

Auxiliary Equipment Monitoring System for CVD Tools

Built custom controllers and a SCADA monitoring system for temperature, pressure, level and leak conditions on auxiliary CVD equipment.

CIMONSCADACMSEMSMONITORING SYSTEM반도체CVD
Auxiliary Equipment Monitoring System for CVD Tools field photo

Work Performed

Site Requirement

Important auxiliary equipment data was not connected to the main CVD tool.

Work Performed

Built equipment-specific controllers, connected field sensors and integrated the signals into a central monitoring system.

Result

Operators can monitor current conditions, alarms and historical data from a unified SCADA interface.

Field Photos

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Start with the equipment model and current symptom.

Send the equipment or controller model, current issue and preferred schedule. We will reply with the information needed to define the work scope.

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Auxiliary Equipment Monitoring System for CVD Tools | JUNgenius · 제이유엔지니어스